发明名称 METHOD OF MANUFACTURING STRUCTURE FOR MOLD, AND METHOD OF MANUFACTURING MOLD
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a structure for manufacturing a mold, capable of improving the transfer accuracy of an uneven pattern of a mold.SOLUTION: A method of manufacturing a structure for manufacturing a mold has a mesa formation step for forming a mesa surrounded by a step on the first principal surface of a planar body, an outer peripheral surface grinding step for grinding the outer peripheral surface with reference to the surface shape of the mesa, following to the mesa formation step, and a recess formation step for forming a recess with reference to the surface shape of the mesa, on the second principal surface opposite from the first principal surface of a planar body, following to the outer peripheral surface grinding step. The surface of the mesa is a formation surface of an uneven pattern for imprint.
申请公布号 JP2015225996(A) 申请公布日期 2015.12.14
申请号 JP20140111041 申请日期 2014.05.29
申请人 ASAHI GLASS CO LTD 发明人 KUMAGAI HIROHIKO;IWAHASHI KOSHIN
分类号 H01L21/027;B29C33/38;B29C59/02 主分类号 H01L21/027
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