发明名称 |
SAPPHIRE SUBSTRATE AND MANUFACTURING METHOD OF THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a sapphire substrate which inhibits cracks from being caused by temperature gradient in the sapphire substrate.SOLUTION: A sapphire substrate includes: a main surface; a rear surface facing the main surface; and an end surface. Chamfered parts are provided between the main surface and the end surface and between the rear surface and the end surface. Mirror polishing is performed to the end surface and the chamfered parts. |
申请公布号 |
JP2015225902(A) |
申请公布日期 |
2015.12.14 |
申请号 |
JP20140108453 |
申请日期 |
2014.05.26 |
申请人 |
SUMITOMO METAL MINING CO LTD |
发明人 |
YAMAGATA TOSHIYUKI;YAMAKI RYOTA;MATSUMOTO HIROSHI |
分类号 |
H01L21/304;B24B9/00;B24B21/02;C30B29/20;C30B33/00;H01L21/02 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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