发明名称 SEMICONDUCTOR STRIP SAWING APPARATUS
摘要 The present invention relates to a suction plate and a semiconductor strip sawing apparatus having the same, in which pneumatic pressure is uniformly and efficiently applied to the suction plate of the semiconductor strip sawing apparatus and processes can be performed under various requirements.
申请公布号 SG11201508562Y(A) 申请公布日期 2015.11.27
申请号 SG11201508562Y 申请日期 2014.04.14
申请人 HANMI SEMICONDUCTOR CO.,LTD 发明人 LIM, JAI-YOUNG;BONG, SOON-KEE;LIM, JAI-YOUNG;BONG, SOON-KEE
分类号 H01L21/301;H01L21/02 主分类号 H01L21/301
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