High Q factor inductor structure

摘要

The present disclosure provides a vertical inductor structure in which the magnetic field is closed such that the magnetic field of the vertical inductor structure is cancelled in the design direction outside the vertical inductor structure, yielding a small, or substantially zero, coupling factor of the vertical inductor structure. In one embodiment, several vertical inductor structures of the present disclosure can be placed in close proximity to create small resonant circuits and filter chains.

主权项

1. An inductor structure in a substrate comprising:
a first connector plate; a second connector plate; a third connector plate; a first terminal plate; a second terminal plate; a first elongated via column that is elongated along a first plane, wherein the first elongated via column connects the first terminal plate to the first connector plate; a second elongated via column that is elongated along a second plane, wherein the second elongated via column connects the second terminal plate to the second connector plate and wherein the first elongated via column and the second elongated via column are positioned such that the first plane is substantially perpendicular to the second plane; a third elongated via column that is elongated along a third plane, wherein the third elongated via column connects the first connector plate to the third connector plate and wherein the third elongated via column is positioned such that the third plane is substantially perpendicular to the first plane and is substantially parallel to the second plane; a fourth elongated via column that is elongated along a fourth plane, wherein the fourth elongated via column connects the second connector plate to the third connector plate and wherein the fourth elongated via column is positioned such that the fourth plane is substantially perpendicular to the both the second plane and the third plane and is substantially parallel to the first plane; and wherein the third connector plate is connected from the third elongated via column to the fourth elongated via column such that the third connector plate is substantially perpendicular to the first connector plate and the second connector plate and such that current propagates in opposite directions through the first connector plate and the second connector plate.