| 摘要 |
PROBLEM TO BE SOLVED: To adjust a table base to a desired tilt without requiring time and labor.SOLUTION: A grinding device includes: a table base 11 in which a chuck table for holding and rotating a plate-like workpiece is mounted on a table mounting surface 111; a support mechanism 12 capable of adjusting a tilt of the table base 11; and grinding means 13 in which a grinding wheel annularly disposed with grinding stones thereon is mounted on a mount surface 311 and the workpiece is ground by the grinding stones. In the grinding device, a distance between the table mounting surface 111 and the mount surface 311 is measured by measurement means 15 in at least three positions including a center position of the table mounting surface 111 and two positions away from the center position by the same distance, and a control section 19 controls the support mechanism 12 so that a difference between each measured distance coincides with a prescribed target value. |
