发明名称 半導体積層体及びその製造方法、半導体デバイスの製造方法、半導体デバイス、ドーパント組成物、ドーパント注入層、並びにドープ層の形成方法
摘要 <p>A first aspect of the present invention provides a method for producing a semiconductor laminate comprising a substrate having formed thereon a silicon layer with small surface unevenness and high continuity. The method of the first aspect of the present invention for producing a semiconductor laminate having a substrate 10 and a sintered silicon particle layer 5 on the substrate comprises (a) coating a silicon particle dispersion containing a dispersion medium and silicon particles dispersed in the dispersion medium, on a substrate 10 to form a silicon particle dispersion layer 1, (b) drying the silicon particle dispersion layer 1 to form a green silicon particle layer 2, (c) stacking a light-transmitting layer 3 on the green silicon particle layer, and (d) irradiating the green silicon particle layer 2 with light through the light-transmitting layer 3 to sinter the silicon particles constituting the green silicon particle layer 2, and thereby form a sintered silicon particle layer 5.</p>
申请公布号 JP5818972(B2) 申请公布日期 2015.11.18
申请号 JP20140508112 申请日期 2013.03.29
申请人 帝人株式会社 发明人 今村 哲也;富澤 由香;池田 吉紀
分类号 H01L21/20;H01L21/22;H01L21/225;H01L21/336;H01L29/786;H01L31/0352 主分类号 H01L21/20
代理机构 代理人
主权项
地址