ENDPOINT DETERMINATION FOR CAPILLARY-ASSISTED FLOW CONTROL

摘要

Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters.

主权项

1. An endpoint monitoring and control apparatus for a fluid supply vessel in which is disposed an array of capillary tubes arranged in parallel to one another, in a fluid flow path in the vessel including a vacuum actuated dispensing check valve and a discharge conduit, the vessel including a valve head to which the discharge conduit delivers fluid, the valve head containing a valve element that is translatable between fully open and fully closed valve positions, and a discharge port for dispensing fluid from the vessel, so that fluid in dispensing operation of the vessel flows through the flow path in the vessel through the array of capillary tubes, the vacuum actuated dispensing check valve and discharge conduit to the valve head to the discharge port, the endpoint monitoring and control apparatus comprising:
a monitoring unit adapted to monitor at least one characteristic of the fluid supply vessel or a fluid supplied therefrom and to generate an output signal correlative of such characteristic; and a processor unit arranged to receive the output signal of the monitoring unit and, in an endpoint condition of the fluid supply vessel or a fluid supplied therefrom, to responsively generate an output control signal indicative of the endpoint condition.