发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 The present invention provides a manufacturing technique of a semiconductor device and a display device using a peeling process, in which a transfer process can be conducted with a good state in which a shape and property of an element before peeling are kept. Further, the present invention provides a manufacturing technique of more highly reliable semiconductor devices and display devices with high yield without complicating the apparatus and the process for manufacturing. According to the present invention, an organic compound layer including a photocatalyst substance is formed over a first substrate having a light-transmitting property, an element layer is formed over the organic compound layer including a photocatalyst substance, the organic compound layer including a photocatalyst substance is irradiated with light which has passed through the first substrate, and the element layer is peeled from the first substrate.
申请公布号 US2015293404(A1) 申请公布日期 2015.10.15
申请号 US201514749962 申请日期 2015.06.25
申请人 Semiconductor Energy Laboratory Co., Ltd. 发明人 JINBO Yasuhiro;MORISUE Masafumi;KIMURA Hajime;YAMAZAKI Shunpei
分类号 G02F1/1335;G02F1/1333 主分类号 G02F1/1335
代理机构 代理人
主权项 1. (canceled)
地址 Atsugi-shi JP