| 摘要 |
PROBLEM TO BE SOLVED: To provide a cartridge having a reduced possibility of leakage of a chemical solution from the cartridge storing the chemical solution.SOLUTION: A cartridge storing a chemical solution includes: a first container; a second container provided in the first container, for storing the chemical solution; and an exhaust path between the first container and the second container, for exhausting gas generated by the chemical solution stored in the second container. |
