Ultraviolet laser

摘要

A laser device is disclosed that provides at least an ultraviolet laser beam and preferably both an ultraviolet laser beam and a visible laser beam. The laser device includes a semiconductor laser device (e.g. a laser diode) to generate visible laser light which is coupled into a frequency doubling crystal taking the form of a single crystal thin film frequency-doubling waveguide structure. The single crystal thin film frequency-doubling waveguide converts a portion of the visible light emitted by the laser diode into ultraviolet light. Both visible and ultraviolet laser light is emitted from the waveguide. As an example, the single crystal thin film frequency-doubling frequency doubling waveguide includes a frequency doubling crystal region composed of β-BaB2O4 (β-BBO), a cladding region composed of materials that are transparent or nearly transparent at the wavelength of the ultraviolet laser light beam and a supporting substrate composed of any material.

主权项

1. A method of forming a frequency doubling waveguide for ultraviolet light generation, the waveguide including a frequency doubling region, the method comprising:
applying to a surface of the frequency doubling region a cladding region comprising material substantially transparent to light having wavelengths of visible and ultraviolet laser light beams; attaching the cladding region to a substrate; polishing the frequency doubling region to form a single crystal nonlinear optical material thin film; and etching the thin film so to form a ridge-type waveguide structure.