DRIFT CORRECTION METHOD OF ELECTRIC CHARGE PARTICLE BEAM AND ELECTRIC CHARGE PARTICLE BEAM DRAWING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a beam drawing device and method capable of correcting beam position drift with high accuracy.SOLUTION: A drift correction method of an electric charge particle beam comprises the steps of: determining a representative position of an actual result range where the electric charge particle beam was deflected in the past in a drawing direction by using a deflector; and correcting drift of the electric charge particle beam by using a drift amount at the representative position of the actual result range.