| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a side laser irradiator which has a performance being capable of irradiating a target with a plurality of laser beams under a high resolution and high accuracy. <P>SOLUTION: Side laser irradiators 5 and 6 are provided in each of which a target in a long shape is irradiated with laser beams from the side. The side laser irradiators 5 and 6 are configured to extend a length in a width direction on a cross section of supplied laser beams, to split the extended laser beams in the width direction, to provide an optical path difference between split laser beams by deflecting the split laser beams, respectively, and to reduce a length of the deflected laser beams in the width direction. Further, the side laser irradiators 5 and 6 are configured to successively irradiate the target with a plurality of reduced laser beams from one end in a length direction of the target to another end opposed to the one end. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
