| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a sputter neutral particle mass spectroscope that can keep quantitativity of measurements and is consequently enhanced in sensitivity and reproducibility.SOLUTION: A sputter neutral particle mass spectroscope has a sample table that holds a sample as a mass spectroscopic target and has a temperature control mechanism for the sample, an ion beam generator for irradiating the sample held on the sample table with ion beams to generate neutral particles, a laser irradiation device for irradiating the neutral particles with a laser to generate photoexcited ions, an extraction electrode for extracting the photoexcited ions, a mass spectrometer for taking the extracted photoexcited ions and performing mass spectrometry, a driving type mirror that is retractably provided in a laser optical path between the laser irradiation device and the sample table and reflects the laser when located in the laser optical path, and a profiler that is disposed in the reflection direction of the driving type mirror and detects the characteristic of the laser.</p> |
