LIQUID COOLED TRAP,申请号EP19970907580-传众专利搜索

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发明名称	LIQUID COOLED TRAP
摘要
申请公布号	EP0956142(B1)	申请公布日期	2006.06.14
申请号	EP19970907580	申请日期	1997.02.07
申请人	MKS INSTRUMENTS, INC.	发明人	GU, YOUFAN;HAUSCHULTZ, DANA, S.
分类号	B01D53/26;B01D5/00;B01D7/02;B01D8/00;B01D53/00;C23C16/44;H01L21/31	主分类号	B01D53/26
代理机构		代理人
主权项
地址

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