| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing simply a microreactor with a high reliability, which enables an efficient catalytic reaction while suppressing the influence of heat to the outside. <P>SOLUTION: The microreactor 1 comprises a vacuum enclosure 2 and a microreactor body 4 arranged in a vacuum sealed cavity 3 in the vacuum enclosure. In the manufacturing process of a member for the enclosure, a plurality of members for the enclosure 2A, 2B to constitute the enclosure are manufactured. In the puncturing process, an exhaust opening 2b is formed in the member for the enclosure 2B. In the joining process, the microreactor body 4 is loaded on the member for the enclosure to join a plurality of the members for the enclosure to manufacture the enclosure 2. In the airtight inspection process, it is inspected whether or not any leakage is present about the enclosure 2 except the exhaust opening 2b. In the degasifying process, the enclosure 2 is mounted inside a vacuum chamber 21 and is subjected to the degasifying treatment. In the blocking process, the exhaust opening 2b is blocked in the vacuum chamber to form the vacuum sealed cavity 3 in the enclosure 2. <P>COPYRIGHT: (C)2009,JPO&INPIT |
