| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor evaluation device and semiconductor evaluation method that enable a partial discharge that can be generated during measurement of elements to be more efficiently and more reliably suppressed.SOLUTION: A semiconductor evaluation device includes an evaluation jig 12 and a probe substrate 2. The evaluation jig 12 is arranged so as to be able to mount a plurality of semiconductor devices 10. The probe substrate 2 is arranged so as to face the evaluation jig 12 and includes a contact probe 23, a shielding part 22 capable of shielding an electric field, and an insulating substrate 21 that holds the contact probe 23. The evaluation jig 12 includes a plurality of storage parts 17 that are partitioned by a frame part 13 so as to be able to mount each of the plurality of semiconductor devices 10 individually. In a state where a space for mounting each of the plurality of semiconductor devices 10 between the plurality of storage parts 17 and probe substrate 2 is formed by causing the frame part 13 and probe substrate 2 to get close to each other, the contact probe 23 can be brought into contact with the plurality of elements. |
