| 发明名称 | Open air plasma deposition system | ||
| 摘要 | An apparatus may comprise a plasma deposition unit, a movement system, and a mesh system. The plasma deposition unit may be configured to generate a plasma. The movement system may be configured to move a substrate under the plasma deposition unit. The mesh system may be located between the plasma deposition unit and the substrate in which a mesh may comprise a number of materials for deposition onto the substrate and in which the plasma passing through the mesh may cause a portion of the number of materials from the mesh to be deposited onto the substrate. | ||
| 申请公布号 | US9145602(B2) | 申请公布日期 | 2015.09.29 |
| 申请号 | US201113286957 | 申请日期 | 2011.11.01 |
| 申请人 | THE BOEING COMPANY | 发明人 | Matos Marvi A.;Pingree Liam S. Cavanaugh |
| 分类号 | C23C16/00;C23C14/22;C23C14/46;H01J37/32 | 主分类号 | C23C16/00 |
| 代理机构 | Yee & Associates, P.C. | 代理人 | Yee & Associates, P.C. |
| 主权项 | 1. An apparatus comprising: an atmospheric plasma deposition unit configured to generate a plasma; a roll to roll movement system configured to move a substrate under the atmospheric plasma deposition unit; and a mesh system located between the atmospheric plasma deposition unit and the substrate in which a mesh comprises a number of materials for deposition onto the substrate and in which the plasma passing through the mesh causes a portion of the number of materials to be desorbed from the mesh and to be deposited onto the substrate. | ||
| 地址 | Chicago IL US | ||