Micro-electro-mechanical system based focusing device and manufacturing method thereof

摘要

A micro-electro-mechanical system based focusing device and manufacturing method thereof are disclosed. The system includes: a deformable lens, multiple groups of conductive deformable crossbeams and conductive structs; and one or more fixed parts. In each group, each conductive deformable crossbeam corresponds to a conductive struct. The conductive deformable crossbeams and the conductive structs are arranged around the deformable lens and spaced from each other. The conductive deformable crossbeams are suspended in the air, their inner edges are connected with an external edge of the deformable lens and their external edges are connected with the fixed parts. The conductive structs are fixedly connected with the fixed parts and remain stationary. Electrostatic force between the conductive deformable crossbeam and the conductive struct causes the deformable lens to be stretched and rotate, thus, surface curvature and focal length are changed. The device has a small size, low power consumption and low manufacturing cost.

主权项

1. A micro-electro-mechanical system based focusing device, comprising:
a deformable lens having a surface curvature and a focal length, wherein the surface curvature and focal length change in response to a deformation of the deformable lens; multiple groups of conductive deformable crossbeams and conductive structures, wherein each group, each conductive deformable crossbeam corresponds to an adjacent conductive structure, the conductive deformable crossbeams and the conductive structures are arranged around the deformable lens, each conductive deformable crossbeam and each conductive structure are spaced from each other, the conductive deformable crossbeams are suspended in the air, and inner edges of the conductive deformable crossbeams are fixedly connected with an external edge of the deformable lens; and one or more fixed parts, wherein external edges of the conductive deformable crossbeams are fixedly connected with the fixed parts, and the conductive structures are fixedly connected with the fixed parts and remain stationary, and wherein electrostatic force between the conductive deformable crossbeam and the conductive structure in each group enables the conductive deformable crossbeam to have an opposite charge as a charge of the corresponding adjacent conductive structure thereby attracting the conductive deformable crossbeam and the corresponding adjacent conductive structure to each other, so that the deformable lens is stretched and rotates around an optical axis of the deformable lens clockwise or anticlockwise, and further surface curvature and focal length of the deformable lens are changed.