发明名称 SIMPLIFIED LAMP DESIGN
摘要 Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.
申请公布号 SG11201505670X(A) 申请公布日期 2015.09.29
申请号 SGX11201505670 申请日期 2014.03.04
申请人 APPLIED MATERIALS, INC. 发明人 RANISH, JOSEPH M.
分类号 H05B3/00;C23C14/26 主分类号 H05B3/00
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