发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method of the same, which can achieve a low-threshold DWF-MOSFET.SOLUTION: A semiconductor device according to an embodiment comprises: a first gate insulation film 15 provided on a channel region 11; a second gate insulation film 16 having an electric film thickness smaller than that of the first gate insulation film 15a formed on the channel region 11 closer to a source region 14a than the first gate insulation film 15 and adjacent to the first gate insulation film 15; a first gate electrode 17 provided on the first gate insulation film 15, in which a part of the first gate electrode 17 is provided o the second gate insulation film 16; and a second gate electrode 18 having a work function higher than that of the first gate electrode 17.
申请公布号 JP2015170832(A) 申请公布日期 2015.09.28
申请号 JP20140047168 申请日期 2014.03.11
申请人 TOSHIBA CORP 发明人 MIYATA TOSHITAKA
分类号 H01L21/336;H01L21/8234;H01L27/088;H01L29/423;H01L29/49;H01L29/78 主分类号 H01L21/336
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