| 发明名称 |
PHYSICAL QUANTITY SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT |
| 摘要 |
A physical quantity sensor includes: a diaphragm that can deflect and deform; a peripheral wall portion that is disposed around the diaphragm and has a thickness increasing in a direction away from the diaphragm; a deflection amount sensor that detects a deflection amount of the diaphragm; and a temperature sensor that is disposed in the peripheral wall portion. |
| 申请公布号 |
US2015268112(A1) |
申请公布日期 |
2015.09.24 |
| 申请号 |
US201514659916 |
申请日期 |
2015.03.17 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
YAJIMA Aritsugu |
| 分类号 |
G01L9/00 |
主分类号 |
G01L9/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A physical quantity sensor comprising:
a diaphragm that can deflect and deform; a peripheral wall portion that is disposed around the diaphragm and has a thickness increasing in a direction away from the diaphragm; a deflection amount detecting element that is disposed in the diaphragm and detects a deflection amount of the diaphragm; and a temperature sensing element that is disposed in the peripheral wall portion. |
| 地址 |
Tokyo JP |
