METHOD OF MANUFACTURING ELECTROMECHANICAL TRANSDUCER, ELECTROMECHANICAL TRANSDUCER, DROPLET DISCHARGE HEAD, DROPLET DISCHARGE APPARATUS, AND IMAGE FORMING APPARATUS

摘要

A method of manufacturing an electromechanical transducer includes forming a first electrode on a substrate or a base film, forming a piezoelectric film made of lead zirconate titanate on the first electrode, forming a second electrode on the piezoelectric film, and polarizing the piezoelectric film. The polarizing includes applying to the second electrode a positive polarity voltage having a positive polarity relative to a potential of the first electrode, and satisfying a first expression of −EcP−(−Ec)<0 and a second expression of |−EcP−(−Ec)|>0.15×EcPav, where −Ec represents an initial coercive field of a negative polarity side of the electromechanical transducer, −EcP represents a coercive field of the negative polarity side after the applying, EcP represents a coercive field of a positive polarity side after the applying, and EcPav represents an average of absolute values of the coercive field −EcP and the coercive field EcP.

主权项

1. A method of manufacturing an electromechanical transducer, the method comprising:
forming a first electrode on a substrate or a base film; forming a piezoelectric film made of lead zirconate titanate on the first electrode; forming a second electrode on the piezoelectric film; and polarizing the piezoelectric film, the polarizing including
applying to the second electrode a positive polarity voltage having a positive polarity relative to a potential of the first electrode, andsatisfying a first expression of −EcP−(−Ec)<0 and a second expression of |−EcP−(−Ec)|>0.15×EcPav,where −Ec represents an initial coercive field of a negative polarity side of the electromechanical transducer,−EcP represents a coercive field of the negative polarity side of the electromechanical transducer after the applying of the positive polarity voltage to the second electrode,EcP represents a coercive field of a positive polarity side of the electromechanical transducer after the applying of the positive polarity voltage to the second electrode, andEcPav represents an average of an absolute value of the coercive field −EcP and an absolute value of the coercive field EcP.