| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a composite measuring device which enables accurate measurement of a resistance value and surface evenness of a high resistance thin film with one device. <P>SOLUTION: A mounting plate 12 is made of a polyacetal resin, and a guard electrode 52 is disposed on the back surface thereof. A ring electrode 43 and a disk electrode 44 are brought into contact with the surface of a substrate 23 arranged on the mounting plate 12. The disk electrode 44 is connected to the guard electrode 52 through an ammeter 47. The guard electrode 52 is grounded. A voltage is applied between the ring electrode 43 and the disk electrode 44. A resistance value of the high resistance thin film on the surface of the substrate 23 is measured from the detection result of the ammeter 47. As the polyacetal resin has a high resistance value and the surface thereof is flat, the surface unevenness of the substrate 23 can be accurately measured by measuring the displacement of a probe 63 by moving the probe 63 while bringing the probe 63 into contact with the surface of the substrate 23. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
