| 摘要 |
PROBLEM TO BE SOLVED: To provide a method capable of obtaining a high contrast image with a low radiation dose, in a charged-particle microscope of a scanning transmission type.SOLUTION: A method of examining a sample in a charged-particle microscope 1 of a scanning transmission type, includes: irradiating the entire surface of a sample S with a beam of charged particles while the beam is scanned; detecting a flux of charged particles traversing the sample S by a detector D comprising a plurality of detection segments; and recording an output of the detector D as a function of scan position, resulting in accumulation of a charged-particle image of the sample S. Signals from different segments of the detector D are combined so as to produce a vector output from the detector D at each scan position, this data is compiled to obtain a vector field, and the vector field is subjected to a two-dimensional integration operation to produce an integrated vector field image. |
