COMPOSITE OXIDE SINTERED BODY AND SPUTTERING TARGET COMPOSED OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a composite oxide sintered body capable of obtaining a TFT panel excellent in uniformity of TFT characteristics and reproducibility of TFT characteristics and to provide a sputtering target composed of the same.SOLUTION: There is provided a composite oxide sintered body which contains a homologous crystal structure represented by InGaZnO, has a sintered body density of 90% or more in terms of relative density and has an average crystal particle diameter of 10 μm or less.