| 摘要 |
<p>Taking-out standby time, for which a substrate is taken out from substrate processing units, is not long after the substrate is processed by the substrate processing units when the substrate is processed by using the substrate processing units which can be used in parallel. At least two substrate processing units used in parallel are selected among a plurality of substrate processing units. A substrate processing schedule is made and has a substrate return process by a substrate return unit to at least two substrate processing units, a substrate process in at least two substrate processing units, and a substrate taking-out process by the substrate return unit of at least two substrate processing units. Substrates are sequentially processed by controlling the substrate processing units and the substrate return unit according to the substrate processing schedule.</p> |
