| 摘要 |
A technique of preventing the function stop caused by false operation and false output of an inertial sensor by canceling a signal caused by applying of an acceleration other than a measurement signal before input to an LSI circuit is provided. An electrostatic-capacitance MEMS acceleration sensor 100 is configured to include: a movable unit 104; a P-side first electrode pair formed of a detection movable electrode 105a and a detection fixed electrode 106a; a P-side second electrode pair formed of a detection movable electrode 105b and a detection fixed electrode 106b; an N-side first electrode pair formed of a detection movable electrode 109a and a detection fixed electrode 110a; and an N-side second electrode pair formed of a detection movable electrode 109b and a detection fixed electrode 110b, the movable unit 104 is supported at one point of a fixed portion 101 arranged on an inner side of the movable unit 104, and besides, the fixed portion 101 of the movable unit 104, a fixed portion 107 of the detection fixed electrode 106a, a fixed portion 108 of the detection fixed electrode 106b, a fixed portion 111 of the detection fixed electrode 110a, and a fixed portion 112 of the detection fixed electrode 110b are arranged on a line 116 perpendicular to a detection direction 115 of the MEMS acceleration sensor 100, and besides, the P-side first electrode pair and the N-side first electrode pair are arranged on one side of the fixed portion 101 of the movable unit 104, and the P-side second electrode pair and the N-side second electrode pair are arranged on the other side thereof. |
