发明名称 |
PROBE CARD AND WAFER TEST SYSTEM |
摘要 |
<p>A wafer test system according to an embodiment of the present invention includes: a probe card connected to one or more devices under test (DUT) to limit current flowing into each DUT to be lower than or equal to threshold current; and a test controller controlling the size of the threshold current.</p> |
申请公布号 |
KR20150094400(A) |
申请公布日期 |
2015.08.19 |
申请号 |
KR20140015647 |
申请日期 |
2014.02.11 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KANG, SANG GU |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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