发明名称 PROBE CARD AND WAFER TEST SYSTEM
摘要 <p>A wafer test system according to an embodiment of the present invention includes: a probe card connected to one or more devices under test (DUT) to limit current flowing into each DUT to be lower than or equal to threshold current; and a test controller controlling the size of the threshold current.</p>
申请公布号 KR20150094400(A) 申请公布日期 2015.08.19
申请号 KR20140015647 申请日期 2014.02.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KANG, SANG GU
分类号 H01L21/66 主分类号 H01L21/66
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