WAFER TEST APPARATUS

摘要

A wafer test apparatus comprises: a probe station which is provided with a probe card coming in contact with a wafer positioned on a chuck in testing the wafer; a test head which is positioned above the probe card and tests electrical characteristics of a semiconductor chip formed on the wafer; and a probe card leveling unit which is installed in a lower portion of the test head and adjusts the level of the probe card in testing the wafer.