PROTECTIVE LAYER FOR PECVD GRAPHITE BOATS

摘要

The invention relates to an improved protective layer for PECVD graphite boats for receiving wafers and for transporting the same in or through PECVD coating systems, in particular in the photovoltaics industry. The invention is intended to provide a protective layer for PECVD boats which makes it possible to produce a better and more homogeneous antireflection layer on silicon substrates. This is achieved by virtue of the fact that the PECVD boat consisting of graphite is provided with an electrically conductive hard material coating consisting of titanium nitride and/or of titanium carbide and/or of boron carbide (B4C).