| 摘要 |
<p>The present invention relates to equipment for manufacturing a semiconductor, and is to provide an overhead hoist transporter (OHT) control sensor system as an automation system for transporting a semiconductor wafer, the OHT control sensor system comprising: an OHT which is provided to transport a wafer carrier; a processing device which provides a station for the wafer carrier transported by the OHT, on one side, and to perform a semiconductor process; a sensor booth which is configured by a box-shaped frame surrounding the station and has an operation hatch formed on a front face; an optical sensor unit which is installed on one side of the operation hatch and is provided to detect the body of an operator passing through the operation hatch; a communication interface which is installed on one side of the outside of the sensor booth and is provided to transmit a signal input from the optical sensor to the OHT and the processing device; and an OHT input unit which is provided on one side of the OHT and is provided to be connected to the communication interface. The OHT control sensor system provides a detection sensor and a communication interface which is additionally installed in OHT automation equipment and the existing processing device having no detection sensor and no control function, detects movement during an approach to the processing device state, and rapidly stops the operation of the processing device or the OHT.</p> |
