发明名称 |
EVAPORATION SOURCE FOR DEPOSITION APPARATUS |
摘要 |
The present invention relates to an evaporation source for a deposition apparatus. The evaporation source for a deposition apparatus in the present invention supplying an evaporation material for forming an organic thin film on the substrate comprises a housing; multiple crucibles installed inside the housing, and storing the evaporation material inside; a nozzle part coupled with the upper end of the crucibles respectively, and having at least one portion formed to have the front end inclined; a heater part installed to surround the nozzle part, and applying heat to the nozzle part; a heat block plate installed on an upper part of the nozzle part to block heat transferred to the nozzle part; and a nozzle plate installed on the upper surface of the heat block plate corresponding to the multiple nozzle parts, and formed flat in the direction perpendicular to the spray direction of the nozzle parts. |
申请公布号 |
KR20150081857(A) |
申请公布日期 |
2015.07.15 |
申请号 |
KR20140001782 |
申请日期 |
2014.01.07 |
申请人 |
SUNIC SYSTEM. LTD. |
发明人 |
KANG, GWON SARM;AN, O JIN;SUNG, GI HYUN;CHOO, MIN KOOK;KANG, SOON SEOG;LEE, YOUNG JONG |
分类号 |
C23C14/24;C23C14/12;H01L51/56 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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