EVAPORATION SOURCE FOR DEPOSITION APPARATUS,申请号KR20140001782-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	EVAPORATION SOURCE FOR DEPOSITION APPARATUS
摘要	The present invention relates to an evaporation source for a deposition apparatus. The evaporation source for a deposition apparatus in the present invention supplying an evaporation material for forming an organic thin film on the substrate comprises a housing; multiple crucibles installed inside the housing, and storing the evaporation material inside; a nozzle part coupled with the upper end of the crucibles respectively, and having at least one portion formed to have the front end inclined; a heater part installed to surround the nozzle part, and applying heat to the nozzle part; a heat block plate installed on an upper part of the nozzle part to block heat transferred to the nozzle part; and a nozzle plate installed on the upper surface of the heat block plate corresponding to the multiple nozzle parts, and formed flat in the direction perpendicular to the spray direction of the nozzle parts.
申请公布号	KR20150081857(A)	申请公布日期	2015.07.15
申请号	KR20140001782	申请日期	2014.01.07
申请人	SUNIC SYSTEM. LTD.	发明人	KANG, GWON SARM;AN, O JIN;SUNG, GI HYUN;CHOO, MIN KOOK;KANG, SOON SEOG;LEE, YOUNG JONG
分类号	C23C14/24;C23C14/12;H01L51/56	主分类号	C23C14/24
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Control system for an engine grader for changing the contours of building sites and road surfaces comprises a hydraulic cylinder positional sensor for determining the traveling position of a first hydraulic cylinder and a controller

Sun screen unit arrangement for use on vehicle roof, has connection devices for connecting sunscreen units and arranged on inner side of guide rails, and gripping sections bordered by inner surface of guide groove and gripped sections

Sun visor for motor vehicle, has auxiliary blind inserted into and extendable from sun visor, where auxiliary blind is extendable and retractable in self locking manner and has transparency between zero and hundred percent

Antenna arrangement for use on glass roof of vehicle, has antenna fastened to metallic frame of glass floor by recess in glass surface in such manner that metallic frame forms antenna mass, where frame is provided below glass surface

Integrated foil stamping device, has clamps descending laterally downward before third clamp that is behind conveyor belt, where packages are laid at clamps that are accelerated in short-run manner

Goods e.g. leather, drying method, involves integrating limit values for relative humidity to maintain air humidities, and maintaining ventilation cycles in form of stepless adjustment of switch on and off times or air amount regulation

Internal-combustion engine`s valve gear, has switchable rocker arms with outer and inner levers, that are supported on supporting element over complementary surface, and lost-motion spring with impact surface which is supported at cam shaft

Medical imaging device e.g. computer tomography device for imaging e.g. beating heart on e.g. film, has detector system movable by movement device in circumferential direction of free space

Electronic switch for integrated services digital network interface, has two transformers used for switching between two interfaces, and connection for center tapping of transformers designed by switching unit

Weather-proof wood veneer manufacturing method for e.g. form plywood, involves thermally re-retreating veneer of preset thickness at temperature of predetermined degree centigrade over preset time, as wood veneer

Handle for container, especially for a heat-transfer medium/header of a boiler, fastens on the container by means of a soldered linking section

Fixing device for electromagnet and safety-deposit box block, has primary unit in which electromagnet is adjustably connected with guidance, which has slotted hole or oval opening

Inflatable gas bag for restraint system of vehicle, has fold, which is fixed using retaining unit, and string unit, which extends over fold, where string unit includes two string unit ends

Eye mask, has two mask portions with concave shapes as whole, set of small holes formed on outer walls of respective mask portions, and O-rings and strap provided on rear portions of support units on both sides of eye mask

Exhaust gas guiding device for use in internal combustion engine of motor vehicle, has exhaust gas lines guided in area of coupling point such that flows have opposite directional components

Lifting device e.g. elevator, for building, has drive unit for vertical lifting of load attachment and/or counterweight of load attachment, and sensor device for detecting disturbance, where sensor device is separated from chain

Thread producing or reworking tool, has multiple molded teeth successively arranged in feed direction, where each molded tooth has tooth profile with two tooth flanks and tooth head protruding outwards radially by tooth axis

Carriage for use in mining plane or coal plane for underground mining industry, has damping unit integrated into front part, which cooperates with associated anti-stop surface that is dampened in both driving directions

Gutter cleaning device, has trapping device with filter located in gutter, where dirt particles present at trapping device are moved from gutter by pulling trapping device on bar over hinge

Torque determination method for motor vehicle, involves transmitting torque along transmission line at time on basis of which rotating position signal connection is determined with instantaneously generated rotating position signals