| 摘要 |
A view port for observing ingot growing process of the present inventing for observing inside of a chamber providing a space in which growing process of ingot is performed comprises a body part arranged on one side of the chamber, and including a hole connected to the inside of the chamber; a window inserted into the hole of the body part, maintaining a sealed state of the chamber, and penetrating light inside the chamber; and a window purge installed on side surface of the body part, and forming an air curtain to block access of external air to the window. The disclosed view port of the present invention not only prevents glass contamination, but also has an advantage of independently washing contaminated glass of the view port. A user can clearly observe ingot growing inside the chamber through the view port to determine a process condition through accurately observed process data, thereby having an advantage of producing high quality ingot. |
