发明名称 METHOD FOR DETERMINING THE HYDROGEN PEROXIDE IN ALKALINE SOLUTIONS IN THE MICROELECTRONICS.
摘要 <p>The spectrometric and colorimetric methods are used for determining hydrogen peroxide (H2O2) and are based on chemical reactions originated by the addition of chemical reactants that generate dyed compounds upon being reacted with the hydrogen peroxide, which are detected in a photometric manner at a predetermined light length. The disadvantages of these methods are their complexity that avoids the same to be automatically applied, requiring trained personnel for applying the same, also using chemical reactants that may cause problems in the clean room of a semiconductor company. These disadvantages are eliminated by a method that does not apply any chemical reactant, based on the thermal decomposition of the hydrogen peroxide and the measurement of the amount of oxygen produced by said decomposition, which would be proportional to the concentration of hydrogen peroxide.</p>
申请公布号 MX2014000646(A) 申请公布日期 2015.06.17
申请号 MX20140000646 申请日期 2013.12.17
申请人 UNIVERSIDAD AUTONOMA DE BAJA CALIFORNIA 发明人 ROUMEN KOYTCHEV ZLATEV;MARGARITA STILIANOVA STOYTCHEVA;BENJAMÍN VALDEZ SALAS
分类号 G01N27/28;G01N27/30 主分类号 G01N27/28
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