| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding device capable of preventing grinding water from accumulating in a circular recess of a plate like workpiece, formed by grinding, and thus preventing clogging of a grindstone of a grinding wheel and damage of a surface to be ground of the plate like workpiece. ! SOLUTION: In a grinding device 10 for grinding a center part of at least one surface of a disk plate like workpiece 80 held on a chuck table 21, by grinding means 14, to form an annular projection 82 at an outer peripheral part, a holding surface 211 of the chuck table 21 is provided downward. The grinding means 14 is provided so as to grind the plate like workpiece 80 with a grindstone 72 facing upward, and grinding water is supplied to the plate like workpiece 80 from a grinding water supply nozzle 31. The grinding water falls by gravity, and the grinding water does not accumulate in a circular recess 81 formed by grinding, thus making it possible to prevent clogging of the grindstone 72 and damage of t |
