| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of raising inspection accuracy of an inspection object by immediately responding to dark output such as dark current and variation of detection sensitivity to perform correction in an X-ray detector, and a computer program for the X-ray inspection device. <P>SOLUTION: An X-ray inspection device 100 includes a transportation conveyor 104 at a state of penetrating in a housing 101. An X-ray irradiator 105 which applies X-rays L is provided at an upper part of the transportation conveyor 104 in the housing 101, and an X-ray line sensor 107 is provided at a state of facing the X-ray irradiator 105 inside the transportation conveyor 104. In addition, a work detector 108 is provided on the upstream side than the X-ray line sensor 107 on a conveyance path of an inspection object WK in the housing 101. A computer device 120 which controls actuation of the X-ray inspection device 100 executes dark output correction and detection sensitivity correction of the X-ray line sensor 107 whenever the work detector 108 detects the inspection object WK. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
