发明名称 軸方向力均衡手段を有する再生式真空ポンプ
摘要 <p>A vacuum pump rotor suitable for use in a vacuum pump is described for a vacuum pump that comprises a regenerative pumping mechanism. The rotor has a generally disc-shaped configuration and is mounted on an axial shaft for rotation relative to a stator of a vacuum pump. The rotor has a first and second opposing surface on which a rotor formations are disposed, each rotor formation defining a portion of a pump stage formed between the pump rotor and a stator for pumping gas from an inlet to an outlet in the same radial direction along the first and second opposing surface. A conduit is provided to interconnect the portions of the pump stage and assist with pressure imbalance that might occur on opposing sides of the rotor.</p>
申请公布号 JP5718907(B2) 申请公布日期 2015.05.13
申请号 JP20120511349 申请日期 2010.05.18
申请人 发明人
分类号 F04D23/00;F04D19/04 主分类号 F04D23/00
代理机构 代理人
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