| 摘要 |
FIELD: measurement equipment.SUBSTANCE: invention relates to instrument making, can be used independently or as a part of measurement and calculation complexes and control systems operating in a wide range of mechanical and thermal actions and intended to receive information on pressure difference of liquid and gaseous media being tested. A measuring method of pressure difference with a frequency-modulated output signal is characterised by the fact that two identical membranes with resonators epitaxially grown on them are used; free oscillations of resonators are excited, and a frequency-modulated output signal is shaped. The method is also characterised by the fact that for excitation of free oscillations there used is Ampere force occurring as a result of interaction of a magnetic field of current flowing via the conductor with current flowing via resonators; with that, the conductor and the resonators are arranged inside a vacuum-treated cavity between the membranes. The pressure difference sensor with a frequency-modulated output signal includes a hollow housing, two identical membranes with resonators epitaxially grown on them, an excitation system of resonator oscillations and an output signal shaping system. Inside the vacuum-treated cavity there located is a current-carrying sputtered conductor creating a magnetic field for excitation of free oscillations of the resonators, and resonators.EFFECT: simpler design and improved manufacturability of a sensor.2 cl, 3 dwg |
