Microplasma generator and methods therefor

摘要

A low-temperature, atmospheric-pressure microplasma generator comprises at least one strip of metal on a dielectric substrate. A first end of the strip is connected to a ground plane and the second end of the strip is adjacent to a grounded electrode, with a gap being defined between the second end of the strip and the grounded electrode. High frequency power is supplied to the strip. The frequency is selected so that the length of the strip is an odd integer multiple of ¼ of the wavelength traveling on the strip. A microplasma forms in the gap between the second end of the strip and the grounded electrode due to electric fields in that region. A microplasma generator array comprises a plurality of strongly-coupled resonant strips in close proximity to one another. At least one of the strips has an input for high-frequency electrical power. The remaining strips resonate due to coupling from the at least one powered strip. The array can provide a continuous line or ring of plasma. The microplasma generator can be used to alter the surface of a substrate, such as by adding material (deposition), removal of material (etching), or modifying surface chemistry.

主权项

1. A plasma generator, comprising:
a substrate having a first surface and a second surface; a linear strip having a first end and a second end provided on the first surface of the substrate, the linear strip having a length that is an odd integer multiple of λ/4 at an operating frequency; a ground plane provided on the second surface of the substrate, the first end of the strip being connected to the ground plane; a ground electrode provided on the first surface of the substrate adjacent to, and spaced apart from, the second end of the strip to define a discharge gap between the second end of the strip and the ground electrode, wherein the ground electrode is connected to the ground plane; and a power connector coupled to the strip for connection to a power source for supplying power to the plasma generator.