发明名称 COPLANAR INTEGRATION OF A DIRECT-BANDGAP CHIP INTO A SILICON PHOTONIC DEVICE
摘要 A method for fabricating a composite device comprises providing a platform, providing a chip, and bonding the chip to the platform. The platform has a base layer and a device layer above the base layer. An opening in the device layer exposes a portion of the base layer. The chip is bonded to the portion of the base layer exposed by the opening in the device layer. A portion of the chip extends above the platform and is removed.
申请公布号 US2015097210(A1) 申请公布日期 2015.04.09
申请号 US201414509971 申请日期 2014.10.08
申请人 Skorpios Technologies, Inc. 发明人 Krasulick Stephen B.;Dallesasse John;Mizrahi Amit;Creazzo Timothy;Marchena Elton;Spann John Y.
分类号 H01L31/109;H01L31/0203;H01L31/0304 主分类号 H01L31/109
代理机构 代理人
主权项 1. A method for fabricating a composite device used for photonics, the method comprising: providing a platform, the platform comprising: a base layer;a device layer above the base layer of the platform, wherein the device layer comprises a plurality of walls forming an opening in the device layer such that a portion of the base layer of the platform is exposed through the device layer; providing a chip, the chip comprising: a substrate; andan active region; bonding the chip to the portion of the base layer of the platform.
地址 Albuquerque NM US