Microlens array and scanning exposure device using same

摘要

In this microlens array, unitary microlens arrays are respectively stacked onto an upper surface and lower surface of a glass plate, and each of the unitary microlens arrays is supported by an upper plate and a lower plate. Marks for alignment are formed on each of the unitary microlens arrays and on the glass plate, and the unitary microlens arrays and the glass plate are stacked onto each other aligned by these marks. This makes it possible to prevent ununiform exposure in scanning exposure using a plurality of microlens arrays.

主权项

1. A microlens array, in which the microlens array is moved along with a light source for emitting an exposure light, the exposure light coming from the light source is transmitted through a pattern formed on a mask, and an erect-same-size image of the mask pattern is formed through the microlens array by the light transmitted through the mask, comprising:
a glass plate, and a plurality of unitary microlens arrays which are stacked onto an upper surface and a lower surface of the glass plate, and are stacked on one another with a plurality of microlenses in a two-dimensional arrangement, said unitary microlens arrays being constituted by arranging, in a second direction orthogonal to a first direction, a plurality of columns of microlenses constituted by arraying a plurality of microlenses in said first direction; a microlens column group being constituted of a predetermined number of columns of microlenses; a plurality of said columns of microlenses being arranged offset by increments of a fixed distance in said first direction in each of the microlens column groups; and a plurality of the microlens column groups being arranged in said second direction, alignment marks being formed on each of said unitary microlens arrays and said glass plate, and said unitary microlens arrays and said glass plate being stacked onto each other aligned by the marks.