Apparatus and method for processing a process simulation database of a process

摘要

A process simulation database includes process simulation data of a plurality of process simulations based on a different variation of a plurality of process parameters. For each process parameter, for an initial number of different process parameter values, process simulation data of a process simulation are included in the process simulation database. A process parameter classifier calculates a linearity indicator for a varied process parameter based on an analysis of the process simulation database with respect to a linearity of an influence of a variation of at least the varied process parameter on the process simulation data in the process simulation database. Further, a process simulation data processor changes the initial number of different process parameter values of the varied process parameter, for which process simulation data of a process simulation are included in the process simulation database, based on the calculated linearity indicator, to obtain a processed process simulation database.

主权项

1. An apparatus for processing a process simulation database of a process, comprising process simulation data of a plurality of process simulations of the process, wherein each process simulation of the plurality of process simulations is based on a different variation of a plurality of process parameters, wherein for each process parameter of the plurality of process parameters, for an initial number of different process parameter values, process simulation data of a process simulation are comprised in the process simulation database, comprising:
at least one computer processor; a process parameter classifier that is implemented to calculate a linearity indicator for a varied process parameter of the plurality of process parameters based on an analysis of the process simulation database with respect to a linearity of an influence of a variation of at least the varied process parameter on the process simulation data in the process simulation database, wherein the process parameter classifier is implemented to calculate, for the varied process parameter, an influence intensity indicator based on an analysis of the process simulation database with respect to intensity of an influence of a variation at least of the varied process parameter on the process simulation data in the process simulation database, and is implemented to allocate the varied process parameter to a first influence-dependent class of process parameters, when the influence intensity indicator fulfills a minimum influence criterion, or to allocate the varied process parameter to a second influence-dependent class of process parameters when the influence intensity indicator does not fulfill the minimum influence criterion, wherein a process parameter that is allocated to the first influence-dependent class of process parameters has a stronger influence on the process simulation data in the process simulation database than a process parameter that is allocated to the second influence-dependent class of process parameters; and a process simulation data processor that is implemented to change the initial number of different process parameter values of the varied process parameter, for which process simulation data of a process simulation are comprised in the process simulation database, based on the calculated linearity indicator to acquire a processed process simulation database.