OPTICAL DEVICE HAVING A STEPWISE OR TAPERED LIGHT INPUT/OUTPUT PART AND MANUFACTURING METHOD THEREFOR

摘要

In a method of manufacturing an optical device including an optical waveguide having a core, a cladding and a light input/output part through which a light beam is input or output, a substrate is prepared which is provided with a uniform thickness of single-crystalline film having its constituent atoms forming a diamond lattice structure and its surface being neither the (111) plane nor its equivalent planes. In the single-crystalline film, a precursor structure is formed which has a precursor of light input/output part. A mask is formed such as to expose the precursor with the remaining part covered. The structure is immersed into an alkaline solution for wet etching with the (111) planes used as etch-stop planes.

主权项

1. A method of manufacturing an optical device comprising an optical waveguide, the optical waveguide comprising a core, a cladding provided around the core, and a light input/output part through which a light beam is input or output, said method comprising:
preparing a substrate having a principal on which a substantially uniform thickness of single-crystalline film is formed, the film having constituent atoms substantially forming a diamond lattice structure and having a surface being of neither a (111) plane nor an equivalent plane to the (111) plane; and subjecting the single-crystalline film to etching showing anisotropy depending on plane orientation to form the film into a terraced or tapered pattern so as to expose the (111) plane and the equivalent plane.