发明名称 加速度検出器、加速度検出デバイス及び電子機器
摘要 <p>An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other.</p>
申请公布号 JP5678741(B2) 申请公布日期 2015.03.04
申请号 JP20110054013 申请日期 2011.03.11
申请人 セイコーエプソン株式会社 发明人 渡辺 潤;中仙道 和之
分类号 G01P15/10 主分类号 G01P15/10
代理机构 代理人
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