| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent variations in output of an accelerometer accompanying a temperature from increasing by reducing stability at stress caused by heat. <P>SOLUTION: A suspension diaphragm (16) is composed to support a precise converter (14) in a container (12). The suspension diaphragm (16) is reinforced by a lower flexible preform (152) and a ring-like hybrid support (16B) arranged along the peripheral edge part of an opening of the container (12). The converter (14) is fixed on the suspension diaphragm (16) by using the flexible preform (152) and rigid epoxy in a fixed channel (120). The ring-like hybrid support (16B) is fixed on the outside of the container (12). <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
