| 摘要 |
<p>Provided is an industrial robot for conveying semiconductor wafers between a plurality of FOUPs arranged in a fixed direction and a semiconductor wafer processing device, the robot constituting a part of an EFEM, wherein the size of the EFEM can be reduced in the direction orthogonal to the direction of arrangement of the plurality of FOUPs and the vertical direction, even when a raising and lowering mechanism for raising and lowering the robot body is disposed outside the robot body. In a standby state where an arm (16) of the industrial robot (1) is retracted and a plurality of arm parts (18-20) and hands (14, 15) are vertically overlapping, a part of the arm (16) is disposed farther toward the (Y2) direction than a body section (17) of a robot body (3). The body section (17) of the industrial robot (1) is secured to a raising and lowering mechanism (4) for raising and lowering the robot body (3), the raising and lowering mechanism (4) being disposed on the (Y2) direction side of the body section (17).</p> |
