HIGH RESOLUTION OBJECT INSPECTION APPARATUS USING TERAHERTZ WAVE

摘要

An object inspection apparatus includes a terahertz wave supplying unit for generating a terahertz wave and moving a path of the terahertz wave according to time so that the terahertz wave is supplied to an object to be inspected, a focusing lens located between the terahertz wave supplying unit and the object to be inspected to focus the terahertz wave supplied by the terahertz wave supplying unit, a rotating plate having a plate shape and including a plurality of the focusing lenses with different distances from the center thereof, the rotating plate rotating in the circumferential direction so that one of the focusing lenses is located at a path of the terahertz wave according to the path movement of the terahertz wave, and a terahertz wave detecting unit for collecting and detecting a terahertz wave incident to the object to be inspected.

主权项

1. An object inspection apparatus, comprising:
a terahertz wave supplying unit for generating a terahertz wave and moving a path of the terahertz wave according to time so that the terahertz wave is supplied to an object to be inspected; a focusing lens located between the terahertz wave supplying unit and the object to be inspected so that the terahertz wave supplied by the terahertz wave supplying unit is focused; a rotating plate having a plate shape and including a plurality of the focusing lenses with different distances from the center thereof, the rotating plate rotating in the circumferential direction so that one of the focusing lenses is located at a path of the terahertz wave according to the path movement of the terahertz wave; and a terahertz wave detecting unit for collecting and detecting a terahertz wave incident to the object to be inspected.