SUSCEPTOR AND MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide: a susceptor capable of suppressing a wafer from being caught while reducing the generation of deposits; and a manufacturing device.SOLUTION: A susceptor includes a pocket 22 capable of receiving a wafer 40 having an orientation flat 42. The pocket 22 has an inner wall part 24 formed along the outer periphery of the orientation flat 42 of the wafer 40. A recessed part 28 recessed from the center of the pocket 22 toward the outside direction thereof, as viewed from above the pocket 22, is formed in a part of the inner wall part 24. A step 30 having a height less than the thickness of the wafer 40 is formed in the recessed part 28.