发明名称 GATE VALVE
摘要 <p>The present invention discloses a gate valve for a stable sealing module movement. The gate valve includes: a housing module wherein an inner space is provided with first and second openings which elongatedly extends in a first direction; a sealing module arranged in the housing module, has an elongated shape to correspond to the first and second openings, and performs a push-pull operation by intake and exhaust; and a transfer module arranged outside the housing module, allowing the sealing module to reciprocate in a second direction which crosses the first direction. The transfer module includes first and second shaft assemblies which have an elongated shape in the second direction with one side connected to the sealing module through the housing module; a transfer cylinder unit which provides power such that the first and second shaft assemblies reciprocate in the second direction; and first and second LM guide assemblies coupled respectively with the first and second shaft assemblies, guiding the respective motions of the first and second shaft assemblies in the second direction. The first and second LM guide assemblies provide guiding such that the sealing module can be moved with stability.</p>
申请公布号 KR101485762(B1) 申请公布日期 2015.01.26
申请号 KR20130133877 申请日期 2013.11.06
申请人 ATS ENGINEERING CO., LTD. 发明人 KIM, JONG HOON;KIM, DO WAN
分类号 H01L21/67;F16K3/20;F16K51/02;H01L21/677 主分类号 H01L21/67
代理机构 代理人
主权项
地址