HAND APPARATUS AND TRANSFERRING APPARATUS HAVING THE SAME FOR SUBSTRATE

摘要

The present invention relates to a hand device for a substrate transfer apparatus. The hand device comprises: a coupling body having a fork coupled thereto to support a substrate; a first reinforcement unit combined to the coupling body to be connected to a first surface and a second coupling surface facing the first surface of the coupling body; and a second reinforcement unit combined to the coupling body to be connected to the first and second surfaces of the coupling body. The hand device is provided to increase productivity in a substrate manufacturing process by increasing the transfer speed of the substrate transfer apparatus, as the hand device securely supports the fork and is light in weight.